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Air Pollution Control and Emissions Standards for the Semiconductor Industry - Article 3

Air Pollution Control and Emissions Standards for the Semiconductor Industry｜第 3 條｜大氣環境｜Regulation｜In Force

環境部｜v1.0

Last Amended: 2023-05-04

Content

These Standards shall apply to the Semiconductor manufacturing industry. However, the substance in question shall not be subject to these Standards when the annual consumption of raw materials (supplies) of the Semiconductor manufacturing industry is less than the amount listed in the following table:

Related Regulations - Air Pollution Control and Emissions Standards for the Semiconductor Industry

• Waste Incinerator Dioxin Control and Emission Standards - Article 2（第 2 條）
• Air Pollution Control and Emissions Standards for the Semiconductor Industry - Article 6（第 6 條）
• Air Pollution Control and Emissions Standards for the Semiconductor Industry - Article 1（第 1 條）
• Air Pollution Control and Emissions Standards for the Semiconductor Industry - Article 2（第 2 條）
• Air Pollution Control and Emissions Standards for the Semiconductor Industry - Article 4（第 4 條）
• Air Pollution Control and Emissions Standards for the Semiconductor Industry - Article 5（第 5 條）