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Air Pollution Control and Emissions Standards for the Semiconductor Industry - Article 4

Air Pollution Control and Emissions Standards for the Semiconductor Industry｜第 4 條｜大氣環境｜Regulation｜In Force

環境部｜v1.0

Last Amended: 2023-05-04

Content

Air pollutants generated by the Semiconductor manufacturing industry shall be gathered by a closed gas gathering system. They may not be discharged until provisions set forth in the following table are observed: In the event that the foregoing exhaust gases discharged, including nitric acid, hydrochloric acid, phosphoric acid, hydrofluoric acid, sulfuric acid, etc., cannot be proved to meet the standard under the preceding paragraph due to safety concerns, relevant documentary evidence shall be submitted to the competent authority of the municipality or county (city) to prove the control conditions with the equivalent or better treatment effect:

Related Regulations - Air Pollution Control and Emissions Standards for the Semiconductor Industry

• Waste Incinerator Dioxin Control and Emission Standards - Article 2（第 2 條）
• Air Pollution Control and Emissions Standards for the Semiconductor Industry - Article 6（第 6 條）
• Air Pollution Control and Emissions Standards for the Semiconductor Industry - Article 1（第 1 條）
• Air Pollution Control and Emissions Standards for the Semiconductor Industry - Article 2（第 2 條）
• Air Pollution Control and Emissions Standards for the Semiconductor Industry - Article 3（第 3 條）
• Air Pollution Control and Emissions Standards for the Semiconductor Industry - Article 5（第 5 條）