Air Pollution Control and Emissions Standards for the Semiconductor Industry｜第 6 條｜大氣環境｜Regulation｜In Force
環境部｜v1.0
Last Amended: 2023-05-04
The recording, preservation and declaration of VOCs, trichloroethylene, nitric acid, sulfuric acid, hydrochloric acid, phosphoric acid, hydrofluoric acid, etc., shall meet the following requirements: 1. Air pollutant input volume (volume added to processes as a solvent or in other forms), output volume (volume leaving processes with waste solvent, waste, wastewater or in other forms), pollution prevention and control equipment reduction quantity and other data shall be recorded on a monthly basis. 2. When the pollution prevention and control equipment is an acid-alkali washing and absorption facility, service and maintenance matters shall be recorded, and the washing cycle water volume and pH value of each washing tank shall be recorded on a daily basis. 3. When the pollution prevention and control equipment is a water washing and absorption facility, service and maintenance matters shall be recorded, and the washing cycle water volume andwastewater discharge rate of each washing tank shall be recorded on a daily basis. 4. When the pollution prevention and control equipment is a condenser, condensate volume shall be recorded monthly, and condenser outlet temperature shall be recorded daily. 5. When the pollution prevention and control equipment is a biological treatment facility, service and maintenance matters shall be recorded to ensure that the state of the facility is suitable for biological growth and metabolism, and the volume of gas treated, inlet temperature and outlet relative humidity shall be recorded on a daily basis. 6. When the pollution prevention and control equipment is a thermal incinerator, combustion temperature shall be recorded on a daily basis. 7. When the pollution prevention andcontrol equipment is a catalytic incinerator, the type of catalyst and the catalytic bed replacement date shall be recorded, and the catalytic bed inlet and outlet gas temperatures shall be recorded on a daily basis. 8. When the treatment is carried out using other pollution prevention and control equipment, service and maintenance matters shall be recorded, and chief operating parameters shall be recorded on a daily basis. 9. When flowmeters and concentration monitors are required, the flow and concentration monitoring results shall be corrected based on the last testing results to calculate the discharge reduction rate and the discharge volume, and the hourly average and daily average shall be recorded on a daily basis. 10. Records under the preceding nine paragraphs shall be kept in electronic form for reference for at least six years, and records of the previous quarter shall be submitted to the local competent authorities by the end of January, April, July and October each year in a format required by the central competent authority. The competent authority may adjust the contents and frequency of such submissions when appropriate.